Oxide dataset

Variability in Semiconductor Manufacturing

nlme package Read PDF manual

Maintainer: R Core Team
License: GPL (>= 2)
Last published: 2025-03-31

About the dataset

Number of rows: 72
Number of columns: 5
Class: nmGroupedData, groupedData, data.frame

Column names and types

Source:factor
Lot:factor
Wafer:factor
Site:factor
Thickness:numeric