Semi2 dataset

Oxide layer thicknesses on semiconductors

SASmixed package Read PDF manual

Maintainer: Steven Walker
License: GPL (>= 2)
Last published: 2014-03-11

About the dataset

Number of rows: 72
Number of columns: 5
Class: data.frame

Column names and types

Source:factor
Lot:factor
Wafer:factor
Site:factor
Thickness:numeric