Semiconductor dataset

Semiconductor split-plot experiment

SASmixed package Read PDF manual

Maintainer: Steven Walker
License: GPL (>= 2)
Last published: 2014-03-11

About the dataset

Number of rows: 48
Number of columns: 5
Class: data.frame

Column names and types

resistance:numeric
ET:factor
Wafer:factor
position:factor
Grp:factor