WaferTypes dataset

Data on different types of silicon wafers

SASmixed package Read PDF manual

Maintainer: Steven Walker
License: GPL (>= 2)
Last published: 2014-03-11

About the dataset

Number of rows: 144
Number of columns: 8
Class: data.frame

Column names and types

Group:factor
Temperature:factor
Type:factor
Wafer:numeric
Site:numeric
delta:numeric
Thick:numeric
uWafer:factor